Direct patterning of TiO2 and TiN based sol-gel using laser interference and nanospheres UV lithography

Y. Jourlin; N. Crespo-Monteiro; A. Valour

doi:10.1117/12.2596229

1 August 2021 Direct patterning of TiO₂ and TiN based sol-gel using laser interference and nanospheres UV lithography

Y. Jourlin, N. Crespo-Monteiro, A. Valour

Proceedings Volume 11801, UV and Higher Energy Photonics: From Materials to Applications 2021; 1180104 (2021) https://doi.org/10.1117/12.2596229
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States

Abstract

In this paper, a direct and cost-effective sol-gel method enables to produce stable titanium dioxide and titanium oxynitride photoresists is described. This approach is compatible with many photolithographic techniques. We show that laser interference lithography and nanosphere lithography can be used, respectively, to obtain homogeneous TiO₂ diffraction gratings and periodic nanopillars over large areas. Further developments permit to transform TiO₂ microstructured based sol-gel to TiN metallic microstructured layer, with good optical properties, by using an innovative rapid thermal nitridation process, which opens the way towards plasmonics and NIR filters based on periodic metallic microstructured layers.

Conference Presentation

Citation Download Citation

Y. Jourlin, N. Crespo-Monteiro, and A. Valour "Direct patterning of TiO₂ and TiN based sol-gel using laser interference and nanospheres UV lithography", Proc. SPIE 11801, UV and Higher Energy Photonics: From Materials to Applications 2021, 1180104 (1 August 2021); https://doi.org/10.1117/12.2596229

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available