PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Fabrication and scaling of disordered hyperuniform (dHU) materials remain hampered by the difficulties in controlling the spontaneous phenomena leading to this novel kind of exotic arrangement of objects. In this work, we demonstrate a hybrid top-down/bottom-up approach based on sol-gel dip-coating and nano-imprint lithography for the faithful reproduction of dHU metasurfaces in metal oxides (MOx). Nano- to micro-structures made of silica and titania can be directly printed over several cm2 on glass and on silicon substrates. Firstly, we describe the polymer mold fabrication starting from a hard master obtained via spontaneous solid-state dewetting. Then we address the effective dHU character of the master and of the replica and the role of the initial thickness of the sol-gel layer on the MOx replicas. Finally, these structures will be optimized towards their exploitation in many potential photonic applications like photonic devices (anti-reflection coatings, quantum emitters).
Zeinab Chehadi,Mohammed Bouabdellaoui,Mehrnaz Modaresialam,David Grosso, andMarco Abbarchi
"Scalable disordered hyperuniform architectures via nano-imprint lithography of metal oxides for different photonic applications", Proc. SPIE 11802, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII, 118020A (1 August 2021); https://doi.org/10.1117/12.2595567
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Zeinab Chehadi, Mohammed Bouabdellaoui, Mehrnaz Modaresialam, David Grosso, Marco Abbarchi, "Scalable disordered hyperuniform architectures via nano-imprint lithography of metal oxides for different photonic applications," Proc. SPIE 11802, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII, 118020A (1 August 2021); https://doi.org/10.1117/12.2595567