Presentation + Paper
3 August 2021 Characterization of the optical performance and scatter of an infrared dielectric metasurface lens
Author Affiliations +
Abstract
Optical metasurfaces are designed to control light similarly to conventional refractive optics, but with considerably less size and weight. They manipulate light based on the designed scattering from subwavelength resonant nanostructures within the surface. Such devices have only recently been fabricated. We characterized the performance of a 4-cm-focallength infrared dielectric metasurface lens using a scanning InSb detector array to record the intensity field behind the lens through its focal point and an optical scatterometer to measure its scatter. For the scatter measurements, a 5-mm-diameter beam illuminated a subsection of the metasurface at ten locations across the 40-mm extent of the lens to evaluate scattering in each subsection. The affected beam was steered through the lens’ focal point and expanded beyond it due to the 50-cm length of the scatterometer’s measurement arm. In general, the metasurface had scattering “shoulders” at angles outside the intended focal area about 2 orders of magnitude in transmission distribution space (Sr-1) higher than those of either a comparable infrared refractive optic or a flat polished silicon substrate; an additional forward-scattering lobe and a colinear peak caused by light travelling through the metasurface unaffected, which are not typically observed in a refractive lens, were also observed.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew R. Miller, Ekaterina Poutrina, Piyush J. Shah, Samuel D. Butler, Michael A. Marciniak, and Augustine M. Urbas "Characterization of the optical performance and scatter of an infrared dielectric metasurface lens", Proc. SPIE 11802, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII, 118020B (3 August 2021); https://doi.org/10.1117/12.2594928
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KEYWORDS
Silicon

Scattering

Sensors

Semiconducting wafers

Laser scattering

Dielectrics

Diffraction

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