Hands-on project aimed at technical education: realizing a DC magnetron sputtering system

S. Massahi; D. D. M. Ferreira; Michael H. Avngaard; A. B. Christensen; D. T. Haugbølle; K. W. Jensen; I. F. Mejnertz; J. S. Selsner; M. J. Westermann; R. Fléron; F. E. Christensen; N. Gellert; S. Svendsen; P. L. Henriksen; A. 'S Jegers

doi:10.1117/12.2594434

7 September 2021 Hands-on project aimed at technical education: realizing a DC magnetron sputtering system

S. Massahi, D. D. M. Ferreira, Michael H. Avngaard, A. B. Christensen, D. T. Haugbølle, K. W. Jensen, I. F. Mejnertz, J. S. Selsner, M. J. Westermann, R. Fléron, F. E. Christensen, N. Gellert, S. Svendsen, P. L. Henriksen, A. 'S Jegers

Author Affiliations +

Proceedings Volume 11815, Novel Optical Systems, Methods, and Applications XXIV; 118150Q (2021) https://doi.org/10.1117/12.2594434
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Conference Poster

Abstract

We present a teaching concept which combines theory, experimental work, project management and organization. As part of the Earth and Space Physics and Engineering education at DTU Space, a group of first year undergraduate students were given the task to design, build and test a DC magnetron sputtering system within a very limited budget and time frame. The teaching concept is designed to promote the students’ autonomous learning, and a major part of the project was to teach the students how to develop group dynamics successfully. The students successfully managed to build a direct current magnetron sputtering system wherein a plasma glow was produced. The system can be used for depositing thin film coatings, an enabling technology for numerous applications.

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S. Massahi, D. D. M. Ferreira, Michael H. Avngaard, A. B. Christensen, D. T. Haugbølle, K. W. Jensen, I. F. Mejnertz, J. S. Selsner, M. J. Westermann, R. Fléron, F. E. Christensen, N. Gellert, S. Svendsen, P. L. Henriksen, and A. 'S Jegers "Hands-on project aimed at technical education: realizing a DC magnetron sputtering system", Proc. SPIE 11815, Novel Optical Systems, Methods, and Applications XXIV, 118150Q (7 September 2021); https://doi.org/10.1117/12.2594434

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