Presentation + Paper
3 September 2021 SPO mirror plate production and coating
Author Affiliations +
Abstract
The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics and will enable future X-ray observatories such as Athena and Arcus. SPO is being developed at cosine Research B.V. together with the European Space Agency (ESA) and academic as well as industrial partners. For Athena, about 150,000 mirror plates are required. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular SPO mirror plates in high quality, large quantity and at low cost. Over the last years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. The paper will provide an overview of most recent SPO plate designs, mirror plate production status and plan forward including reflective coating process as well as mass production developments.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Boris Landgraf, Ljubiša Babić, Nicolas M. Barrière, Alex Bayerle, Luigi Castiglione, Maximilien J. Collon, Noë Eenkhoorn, David Girou, Ramses Günther, Enrico Hauser, Yvette Jenkins, Laurens Keek, Ben Okma, Gregorio M. Serano, Aniket Thete, Giuseppe Vacanti, Sjoerd Verhoeckx, Mark Vervest, Luc Voruz, Marco W. Beijersbergen, Marcos Bavdaz, Eric Wille, Ivo Ferreira, Sebastiaan Fransen, Brian Shortt, Mark O. Riekerink, Jeroen Haneveld, Arenda Koelewijn, Maurice Wijnperlé, Jan-Joost Lankwarden, Bart Schurink, Ronald Start, Coen van Baren, Paul Hieltjes, Jan-Willem den Herder, Evelyn Handick, Michael Krumrey, Miranda Bradshaw, Vadim Burwitz, Sonny Massahi, Sara Svendsen, Desirée D. M. Ferreira, Finn E. Christensen, Giuseppe Valsecchi, Geeta Kailla, Gavin Phillips, William Mundon, Ian Chequer, and Kevin Ball "SPO mirror plate production and coating", Proc. SPIE 11822, Optics for EUV, X-Ray, and Gamma-Ray Astronomy X, 1182207 (3 September 2021); https://doi.org/10.1117/12.2594234
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KEYWORDS
Coating

Mirrors

Silicon

Photoresist materials

Semiconducting wafers

Optics manufacturing

Inspection

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