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10 August 2021 Assessing the spectral resolution of high energy diffraction gratings made with electron-beam lithography
Casey T. DeRoo, Randall L. McEntaffer, Fabien Grise, Benjamin Donovan
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Proceedings Volume 11822, Optics for EUV, X-Ray, and Gamma-Ray Astronomy X; 1182217 (2021) https://doi.org/10.1117/12.2594708
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States
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Casey T. DeRoo, Randall L. McEntaffer, Fabien Grise, and Benjamin Donovan "Assessing the spectral resolution of high energy diffraction gratings made with electron-beam lithography", Proc. SPIE 11822, Optics for EUV, X-Ray, and Gamma-Ray Astronomy X, 1182217 (10 August 2021); https://doi.org/10.1117/12.2594708
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KEYWORDS
Spectral resolution
Diffraction gratings
Electron beam lithography
Lithography
Signal processing
Spectrometer engineering
Spectroscopy
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