Photochemical study of metal infiltrated e-beam resist using vapor-phase infiltration for EUV applications

Su Min Hwang; Aditya Raja Gummadavelly; Dan N. Le; Yong Chan Jung; Jean-Francois Veyan; Nikhill M. Tiwale; Chang-Yong Nam; Jinho Ahn; Jiyoung Kim

doi:10.1117/12.2601033

30 September 2021 Photochemical study of metal infiltrated e-beam resist using vapor-phase infiltration for EUV applications

Su Min Hwang, Aditya Raja Gummadavelly, Dan N. Le, Yong Chan Jung, Jean-Francois Veyan, Nikhill M. Tiwale, Chang-Yong Nam, Jinho Ahn, Jiyoung Kim

Author Affiliations +

Proceedings Volume 11854, International Conference on Extreme Ultraviolet Lithography 2021; 118541C (2021) https://doi.org/10.1117/12.2601033
Event: SPIE Photomask Technology + EUV Lithography, 2021, Online Only

Conference Poster

Abstract

Significant efforts have been dedicated to the development of inorganic-organic hybrid materials for next-generation EUV resists. Among the various synthesis, vapor-phase infiltration of metal source into existing e-beam photoresists using ALD process has drawn great attention. In this work, we have demonstrated the vapor-phase infiltration of both Hf and Al precursors into PMMA and HSQ resists, respectively. For example, under the electron exposure with 100 eV, both hybrid resists show relatively higher EUV absorption, increasing positive and negative tone. The detailed photochemical reactions of on electron exposure were investigated using an in-situ FTIR equipped with electron gun capability.

Conference Presentation

Citation Download Citation

Su Min Hwang, Aditya Raja Gummadavelly, Dan N. Le, Yong Chan Jung, Jean-Francois Veyan, Nikhill M. Tiwale, Chang-Yong Nam, Jinho Ahn, and Jiyoung Kim "Photochemical study of metal infiltrated e-beam resist using vapor-phase infiltration for EUV applications", Proc. SPIE 11854, International Conference on Extreme Ultraviolet Lithography 2021, 118541C (30 September 2021); https://doi.org/10.1117/12.2601033

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available