A new generation cost-efficient laser mask writer, addressable up to the 90nm node

Robert Eklund; Mats Rosling; Mikael Wahlsten; Martin Glimtoft; Göran Hansson; Anders Svensson; Youngjin Park

doi:10.1117/12.2600939

12 October 2021 A new generation cost-efficient laser mask writer, addressable up to the 90nm node

Robert Eklund, Mats Rosling, Mikael Wahlsten, Martin Glimtoft, Göran Hansson, Anders Svensson, Youngjin Park

Proceedings Volume 11855, Photomask Technology 2021; 1185511 (2021) https://doi.org/10.1117/12.2600939
Event: SPIE Photomask Technology + EUV Lithography, 2021, Online Only

Abstract

The semiconductor industry is enjoying the “Semiconductor super cycle” catalyzed by the pandemic. In addition, the variety of semiconductor chips are increasing driven by electronification of everything resulting the demand for laser based mask writers are increasing due to lower exposure cost per mask. However, many laser mask writers in operation today are getting old. As a response to the growing demand Mycronic introduced SLX series, a new generation cost-efficient laser mask writer and the superiority of the system is demonstrated by sharing recent evaluation data with two different laser sources.

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Citation Download Citation

Robert Eklund, Mats Rosling, Mikael Wahlsten, Martin Glimtoft, Göran Hansson, Anders Svensson, and Youngjin Park "A new generation cost-efficient laser mask writer, addressable up to the 90nm node", Proc. SPIE 11855, Photomask Technology 2021, 1185511 (12 October 2021); https://doi.org/10.1117/12.2600939

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