5 February 1990 Vision Based Instrumentation For Microelectronic Materials Processing
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Proceedings Volume 1186, Surface and Interface Analysis of Microelectronic Materials Processing and Growth; (1990) https://doi.org/10.1117/12.963917
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States
Abstract
Proper instrumentation, documentation, and analysis are crucial to the continued advance of micro-electronic materials science. Many important phenomenon are visible. Many of those are progressive events that need observation throughout their transitory period. Microelectronics scientists and engineers have long required optical systems tools which properly handle visible phenomena. An optical based system, called a high-resolution Still/Video system, to fulfill crucial microelec-tronic needs is available. Microelectronic dimensions require the highest possible resolution to resolve the small details. The system provides 1134 by 486 pixel video frames. The transient nature of many events requires video and the associated capability of video recording. The system stores over 14,000 high-resolution video frames on a single standard commercial VHS tape. The widespread use of microscopy requires the ability to operate with a variety of optical microscopes. The system is directly compatible with most microscopes. In addition, analysis requires the ability to produce film and computer processed results of all crucial images. The system has both a companion film printer and a direct computer interface.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Don W. Lake, "Vision Based Instrumentation For Microelectronic Materials Processing", Proc. SPIE 1186, Surface and Interface Analysis of Microelectronic Materials Processing and Growth, (5 February 1990); doi: 10.1117/12.963917; https://doi.org/10.1117/12.963917
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