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19 March 1990 High Temperature Superconducting Films On Silicon
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Proceedings Volume 1187, Processing of Films for High Tc Superconducting Electronics; (1990)
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States
Work on high temperature superconductor films on silicon is reviewed. High temperature superconductor thin films of YBa2Cu3O7-x, (YBCO) have been made on single crystal SrTiO3 with zero resistance transition temperatures(Tc) of 90 K and critical current densities (Jc) up to 5 x 106 A cm-2 at 77 K. Both thick and thin films of YBCO have been made on silicon or on silicon with a buffer layer with Tc up to 85-90 K. Polycrystalline superconducting films with unoriented grains exhibit weak link behavior and have low values of Jc (a few hun-dred A cm-2 at 77 K), whereas the considerably higher value of 6 x 104 A cm-2 at 77 K has been achieved for YBCO deposited on a double epitaxial buffer layer on silicon.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A Mogro-Campero "High Temperature Superconducting Films On Silicon", Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990);

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