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19 March 1990 Stripline Measurements of Surface Resistance: Relation to HTSC Film Properties and Deposition Methods
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Proceedings Volume 1187, Processing of Films for High Tc Superconducting Electronics; (1990) https://doi.org/10.1117/12.965175
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States
Abstract
We describe the measurement of microwave surface resistance, Rs, of thin films of high-transition-temperature superconductors by the stripline resonator method. This method allows measurement of Rs as a function of frequency from 0.5 GHz to 20 GHz and has a sensitivity of greater than 1 x10-7 Ω. Rs for films deposited by various methods has been measured, and a limited temperature dependence for one YBCO film is also reported. The results are related to the deposition methods and film properties.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. E. Oates and A. C. Anderson "Stripline Measurements of Surface Resistance: Relation to HTSC Film Properties and Deposition Methods", Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); https://doi.org/10.1117/12.965175
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