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19 March 1990 Y1Ba2Cu3O7-x Laser-Ablation Plume Dynamics Measurement By Nanosecond Response Ion Probe: Comparison With Optical Measurements.
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Proceedings Volume 1187, Processing of Films for High Tc Superconducting Electronics; (1990) https://doi.org/10.1117/12.965159
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States
Abstract
A family of fast time response ion probes has been developed to study the laser-ablation plume dynamics under Y1Ba2Cu3O7-x film-growth conditions. These probes are useful over a wide range of pressures, distances, laser energies, and energy densities. The ion probe measurements are complemented and corroborated by measurements using spatially and temporally resolved optical emission and absorption spectroscopy. The results confirm a long lived ionized component to the plume and a marked slowing of the plasma front at film deposition pressures and distances. Both the ion probe and spectroscopic techniques show promise as sensitive process monitors for film deposition by laser ablation.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. N. Mashburn and D. B. Geohegan "Y1Ba2Cu3O7-x Laser-Ablation Plume Dynamics Measurement By Nanosecond Response Ion Probe: Comparison With Optical Measurements.", Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); https://doi.org/10.1117/12.965159
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