Optical components are the main parts in laser systems, which limit the total generated output power due to laser-induced damage. At nanosecond laser pulses materials experience thermal expansion, therefore optical coatings gain stress leading to breakdown. Moreover, the main resistance to laser radiation is limited by material itself (band gap). Glancing angle deposition method is presented to produce porous nanostructured coatings, which are characterized by low inner stress. Optical resistivity dependance on porosity of several materials such as aluminium and niobium oxides single layers were evaluated. Furthermore, all-silica Bragg mirrors are formed and optical properties investigated in different environments to achieve stable and superior optical resistance.
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