Fabrication of computer-generated holograms on silicon by femtosecond laser-assisted with chemical etching

Shipeng Zhou

doi:10.1117/12.2602316

24 June 2021 Fabrication of computer-generated holograms on silicon by femtosecond laser-assisted with chemical etching

Shipeng Zhou

Proceedings Volume 11885, International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2021); 118850P (2021) https://doi.org/10.1117/12.2602316
Event: 2021 International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2021), 2021, Xi'an, China

Abstract

We proposed a simple and flexible method for fabricating computer-generated holograms (CGHs) on crystalline silicon via femtosecond laser-assisted with chemical etching. Femtosecond laser irradiation led to the transformation of crystalline silicon into amorphous silicon, and its chemical activity is significantly reduced, so it can be used as an etching mask in alkaline solution. The amorphous silicon mask led to the formation of nanopillar structure after wet etching. The height of the nanopillars could be flexibly adjusted by controlling the etching time. By means of laser dynamic scanning, we realized the fabrication of holographic array on silicon. The diffraction pattern of the CGHs on silicon becomes clearer with the increase of the height of the nanopillar.

Citation Download Citation

Shipeng Zhou "Fabrication of computer-generated holograms on silicon by femtosecond laser-assisted with chemical etching", Proc. SPIE 11885, International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2021), 118850P (24 June 2021); https://doi.org/10.1117/12.2602316

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available