Rapid Thermal Multiprocessing For Micro Factories

Krishna C. Saraswat; Len Booth; David D. Grossman; B. T. Khuri-Yakub; Yong Jin Lee; Mehrdad M. Moslehi; Samuel Wood

doi:10.1117/12.963953

6 April 1990 Rapid Thermal Multiprocessing For Micro Factories

Krishna C. Saraswat, Len Booth, David D. Grossman, B. T. Khuri-Yakub, Yong Jin Lee, Mehrdad M. Moslehi, Samuel Wood

Proceedings Volume 1189, Rapid Isothermal Processing; (1990) https://doi.org/10.1117/12.963953
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States

Abstract

Future success in microelectronics will demand rapid innovation, rapid product introduction and ability to react to a change in technological and business climate quickly. These technological advances in integrated electronics will require development of flexible manufacturing technology for VLSI systems. However, the current approach of establishing megafactories for mass manufacturing of chips will lead to a skyrocketing cost of more than 1 billion dollars to establish a factory by the end of this century. This could result in serious attrition of chip manufacturers. We propose new concepts of a programmable micro factory which may be characterized by more economical small scale production, higher flexibility to accommodate many products on several processes, and faster turnaround and learning. In-situ multi-processing equipment where several process steps can be done in sequence may be a key ingredient in this approach. For this environment to be flexible, the equipment must have ability to change processing environment, requiring extensive in-situ measurements and real time control. In-process and end-of-process measurements coupled with rapid learning through expert systems will facilitate faster innovation and better ability to react to a change.

Citation Download Citation

Krishna C. Saraswat, Len Booth, David D. Grossman, B. T. Khuri-Yakub, Yong Jin Lee, Mehrdad M. Moslehi, and Samuel Wood "Rapid Thermal Multiprocessing For Micro Factories", Proc. SPIE 1189, Rapid Isothermal Processing, (6 April 1990); https://doi.org/10.1117/12.963953

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available