Surface Radiation Characteristics In RTCVD Temperature Measurement/Control

F. Y. Sorrell; J. A. Harris; M. C. Ozturk; J. J. Wortman

doi:10.1117/12.963956

6 April 1990 Surface Radiation Characteristics In RTCVD Temperature Measurement/Control

F. Y. Sorrell, J. A. Harris, M. C. Ozturk, J. J. Wortman

Proceedings Volume 1189, Rapid Isothermal Processing; (1990) https://doi.org/10.1117/12.963956
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States

Abstract

The effect of the surface emissivity on lamp power and the measured pyrometer temperature is investigated by computer simulation. First, the effect of changing emissivity on wafer tempera-ture at constant lamp power (open loop control) during rapid thermal chemical vapor deposition (RTCVD) is demonstrated both experimentally as well. as simulated. Following this validation of the simulation, three control techniques are proposed which will maintain a constant wafer temperature during processing. These techniques still use a pyrometer or pyrometers as the temperature sensor(s). A control algorithm is developed for one of the techniques. The use of this algorithm is demonstrated via the computer simulation.

Citation Download Citation

F. Y. Sorrell, J. A. Harris, M. C. Ozturk, and J. J. Wortman "Surface Radiation Characteristics In RTCVD Temperature Measurement/Control", Proc. SPIE 1189, Rapid Isothermal Processing, (6 April 1990); https://doi.org/10.1117/12.963956

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available