Research on aperture area measurement technique based on optical flux comparison method

Zhiwei Liu; Wende Liu; Weiqiang Zhao; Yongjie Lin; Nan Xu; Yandong Lin

doi:10.1117/12.2601281

9 October 2021 Research on aperture area measurement technique based on optical flux comparison method

Zhiwei Liu, Wende Liu, Weiqiang Zhao, Yongjie Lin, Nan Xu, Yandong Lin

Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 118990Z (2021) https://doi.org/10.1117/12.2601281
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

Accurate measurement of the aperture area has always been the focus of optics and optical radiation measurement. The metrology institutes around the world have established absolute aperture area measurement facilities. In this paper, a measuring system of the aperture area based on optical flux comparison method is designed and implemented., which can transfer absolute values efficiently and accurately. The results show that the deviation between the area measured by optical flux comparison method and the area measured by effective area method is about 5×10^-4 . The influences of the light source stability, irradiation field uniformity and aperture positioning difference on the measurement results are analyzed emphatically. The uncertainty of the measurement results is also evaluated, the relative expanded uncertainty is 9.9×10^{- 4}(k=2).

Citation Download Citation

Zhiwei Liu, Wende Liu, Weiqiang Zhao, Yongjie Lin, Nan Xu, and Yandong Lin "Research on aperture area measurement technique based on optical flux comparison method", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 118990Z (9 October 2021); https://doi.org/10.1117/12.2601281

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