The laser chemical vapor deposition (LCVD) of aluminum and gold has been achieved via pyrolytic decomposition of trimethylamine aluminum hydride and dimethylgold (p-diketonates), respectively. The rates of metal deposition, the purity of the deposited metals and the electrical properties of the deposits are a direct result of the chemical and physical properties of the precursor and the metal.
Thomas H. Baum, Thomas H. Baum,
"Laser-Induced Chemical Vapor Deposition of High-Purity Metals", Proc. SPIE 1190, Laser/Optical Processing of Electronic Materials, (23 February 1990); doi: 10.1117/12.963992; https://doi.org/10.1117/12.963992