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A metal diaphragm-based airflow sensor based on fiber-optic Fabry-Perot (F-P) interference has been proposed and experimentally demonstrated. The sensor is composed of glass sleeving, ceramic ferrule and metal diaphragm. Through data calibration, a practical airflow sensor has been fabricated. As a result of the stainless steel diaphragm and open F-P cavity, the durability of the sensor is ensured, and it can be used in poor air quality environments. Experimental results in the airflow field show that the sensor has the potential to estimate the air quantity of high-speed airflow in various air conduit
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Peng Zhang, Shuang Wang, Junfeng Jiang, Zhiyuan Li, Haokun Yang, Tiegen Liu, "Fiber-optic airflow sensor for air quantity estimation in air conduit," Proc. SPIE 11901, Advanced Sensor Systems and Applications XI, 119010B (9 October 2021); https://doi.org/10.1117/12.2601209