Birefringence mapping of optical material by use of supercontinuum vector beams

Juri Ogawa; Misaki Shoji; Ryo Kageyama; Toshitaka Wakayama; Takeshi Higashiguchi

doi:10.1117/12.2601123

23 August 2021 Birefringence mapping of optical material by use of supercontinuum vector beams

Juri Ogawa, Misaki Shoji, Ryo Kageyama, Toshitaka Wakayama, Takeshi Higashiguchi

Proceedings Volume 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology; 119080Q (2021) https://doi.org/10.1117/12.2601123
Event: Photomask Japan 2021, 2021, Online Only

Abstract

We demonstrate a supercontinuum vector beam analysis based on interactions between angular-variant polarization and birefringence in the solid state. The supercontinuum vector beam analysis provides both the two-dimensional distribution of the birefringence and the wavelength properties, from a single-shot image. The angular resolutions of the retardance and azimuthal angle are evaluated. The retardances were determined at 650 nm to be 92.9° ± 9.3° and 87.1° ± 18.7°, respectively. The spatial resolution of 60 μm and the resolution of the retardance was 12 mrad.

Citation Download Citation

Juri Ogawa, Misaki Shoji, Ryo Kageyama, Toshitaka Wakayama, and Takeshi Higashiguchi "Birefringence mapping of optical material by use of supercontinuum vector beams", Proc. SPIE 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology, 119080Q (23 August 2021); https://doi.org/10.1117/12.2601123

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