Ellipsometric characterizations of individual nanoform structures

Tim Kaeseberg; Jana Grundmann; Sven Teichert; Matthias Wurm; Thomas Siefke; Stefanie Kroker; Bernd Bodermann

doi:10.1117/12.2616273

27 October 2021 Ellipsometric characterizations of individual nanoform structures

Tim Kaeseberg, Jana Grundmann, Sven Teichert, Matthias Wurm, Thomas Siefke, Stefanie Kroker, Bernd Bodermann

Proceedings Volume 11927, Optical Technology and Measurement for Industrial Applications Conference 2021; 119270O (2021) https://doi.org/10.1117/12.2616273
Event: SPIE Technologies and Applications of Structured Light, 2021, Online, Japan

Abstract

Spectroscopic polarization measurement and control using channeled spectrum has several unique features and is useful for various spectroscopic instruments. It utilizes the strong dispersion characteristics in polarization retardation of high-order retarders so that the polarization modulation can be made without using mechanical or active elements for polarization modulation. In this presentation, we describe its principle, basic features, and several applications including a spectroscopic ellipsometer and ultrafast rotations of beam profile and polarization.

Citation Download Citation

Tim Kaeseberg, Jana Grundmann, Sven Teichert, Matthias Wurm, Thomas Siefke, Stefanie Kroker, and Bernd Bodermann "Ellipsometric characterizations of individual nanoform structures", Proc. SPIE 11927, Optical Technology and Measurement for Industrial Applications Conference 2021, 119270O (27 October 2021); https://doi.org/10.1117/12.2616273

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