Fiber-laser crystallization of Si films for advanced displays via the spot-beam annealing method

Ruobing Song; Jayoung Park; Nikita Lisenko; Bonan Shen; Alexander Killips; Adithya P. Nair; Joshua Schoenly; Manuel Leonardo; Roger Dowd; James S. Im

doi:10.1117/12.2611946

4 March 2022 Fiber-laser crystallization of Si films for advanced displays via the spot-beam annealing method

Ruobing Song, Jayoung Park, Nikita Lisenko, Bonan Shen, Alexander Killips, Adithya P. Nair, Joshua Schoenly, Manuel Leonardo, Roger Dowd, James S. Im

Author Affiliations +

Proceedings Volume 11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII; 1198808 (2022) https://doi.org/10.1117/12.2611946
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

In this paper, we report on the findings that pertain to evaluating the immediate viability of an UV-fiber-laserbased Si crystallization method referred to as spot-beam annealing (SBA). The SBA method leverages ultra-high frequency/low-energy pulses in order to flexibly create optimal conditions for executing various crystallization and annealing techniques for display and semiconductor applications. Specifically, we present recent experimental results that were obtained using a newly constructed SBA system that definitively show that SBA is capable of providing a highly ordered polycrystalline material, which is equivalent to the material generated using stateof-the-art ELA manufacturing systems. We discuss the implication of the results on the effectiveness of the polygon-scanner-based beam delivery schemes, and additional future variations and applications of the SBA method.

Conference Presentation

Citation Download Citation

Ruobing Song, Jayoung Park, Nikita Lisenko, Bonan Shen, Alexander Killips, Adithya P. Nair, Joshua Schoenly, Manuel Leonardo, Roger Dowd, and James S. Im "Fiber-laser crystallization of Si films for advanced displays via the spot-beam annealing method", Proc. SPIE 11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, 1198808 (4 March 2022); https://doi.org/10.1117/12.2611946

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