Thermal annealing of thin films using fiber lasers via the spot-beam annealing method

Ruobing Song; Bonan Shen; Nikita Lisenko; Jayoung Park; Wenkai Pan; Joshua Schoenly; Manuel Leonardo; Roger Dowd; James S. Im

doi:10.1117/12.2611967

4 March 2022 Thermal annealing of thin films using fiber lasers via the spot-beam annealing method

Ruobing Song, Bonan Shen, Nikita Lisenko, Jayoung Park, Wenkai Pan, Joshua Schoenly, Manuel Leonardo, Roger Dowd, James S. Im

Author Affiliations +

Proceedings Volume 11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII; 1198809 (2022) https://doi.org/10.1117/12.2611967
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

In this paper, we show via transient thermal analysis that the use of ultra-high-frequency high-power fiber lasers as implemented in the spot-beam annealing method makes it possible to (1) flexibly induce and mimic the overall annealing conditions that were accomplished previously using various other types of lasers, and (2) engineer and leverage the periodic and highly transient thermal spikes that arise due to the individual laser pulses. We point out and discuss how such annealing characteristics may be well-suited for optimally inducing structural/topological relaxation and compositional short-range ordering of amorphous thin films, as for instance are presumably involved in annealing of amorphous IGZO films on high-temperature-processing-intolerant glass/plastic substrates for fabricating stable oxide TFTs for AMOLED displays.

Conference Presentation

Citation Download Citation

Ruobing Song, Bonan Shen, Nikita Lisenko, Jayoung Park, Wenkai Pan, Joshua Schoenly, Manuel Leonardo, Roger Dowd, and James S. Im "Thermal annealing of thin films using fiber lasers via the spot-beam annealing method", Proc. SPIE 11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, 1198809 (4 March 2022); https://doi.org/10.1117/12.2611967

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available