Extended-wavelength 1.3-megapixel type-II superlattice SWIR compact camera system with scalable manufacturing

Martin H. Ettenberg; Pouya Dianat; Michael Lange; Tom Sudol; Hai Nguyen; Armando Gil; Nuha Ahmed; Jamie Phillips

doi:10.1117/12.2614565

4 March 2022 Extended-wavelength 1.3-megapixel type-II superlattice SWIR compact camera system with scalable manufacturing

Martin H. Ettenberg, Pouya Dianat, Michael Lange, Tom Sudol, Hai Nguyen, Armando Gil, Nuha Ahmed, Jamie Phillips

Author Affiliations +

Proceedings Volume 11997, Optical Components and Materials XIX; 1199708 (2022) https://doi.org/10.1117/12.2614565
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

A shortwave infrared camera system with extended bandwidth of greater than 2 m and high resolution of 1.3 megapixels is demonstrated. The imager has a conventional p-i-n structure with type-II superlattice (T2SL) multi quantum well as the absorption region, and is backside illuminated to allow response to 400nm. The focal plane array is shown on both 8- and 12-µm pitches, with a wideband responsivity in a 0.4-2 µm range. New processing methodologies were developed and executed in a fabless model, achieving scalability, cost-efficiency, and high-performance metrics.

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Citation Download Citation

Martin H. Ettenberg, Pouya Dianat, Michael Lange, Tom Sudol, Hai Nguyen, Armando Gil, Nuha Ahmed, and Jamie Phillips "Extended-wavelength 1.3-megapixel type-II superlattice SWIR compact camera system with scalable manufacturing", Proc. SPIE 11997, Optical Components and Materials XIX, 1199708 (4 March 2022); https://doi.org/10.1117/12.2614565

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