Programmable silicon photonic circuits powered by MEMS

Wim Bogaerts; Alain Yuji Takabayashi; Pierre Edinger; Gaehun Jo; Iman Zand; Peter Verheyen; Moises Jezzini; Hamed Sattari; Giuseppe Talli; Cleitus Antony; Mehrdad Saei; Cristina Lerma Arce; Jun Su Lee; Arun Kumar Mallik; Saurav Kumar; Marco Garcia; Tigers Jonuzi; Kristinn B. Gylfason; Niels Quack; Frank Niklaus; Umar Khan

doi:10.1117/12.2614213

5 March 2022 Programmable silicon photonic circuits powered by MEMS

Wim Bogaerts, Alain Yuji Takabayashi, Pierre Edinger, Gaehun Jo, Iman Zand, Peter Verheyen, Moises Jezzini, Hamed Sattari, Giuseppe Talli, Cleitus Antony, Mehrdad Saei, Cristina Lerma Arce, Jun Su Lee, Arun Kumar Mallik, Saurav Kumar, Marco Garcia, Tigers Jonuzi, Kristinn B. Gylfason, Niels Quack, Frank Niklaus, Umar Khan

Author Affiliations +

Proceedings Volume 12005, Smart Photonic and Optoelectronic Integrated Circuits 2022; 1200509 (2022) https://doi.org/10.1117/12.2614213
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We present our work to extend silicon photonics with MEMS actuators to enable low-power, large scale programmable photonic circuits. For this, we start from the existing iSiPP50G silicon photonics platform of IMEC, where we add free-standing movable waveguides using a few post-processing steps. This allows us to implement phase shifters and tunable couplers using electrostatically actuated MEMS, while at the same time maintaining all the original functionality of the silicon photonics platform. The MEMS devices are protected using a wafer-level sealing approach and interfaced with custom multi-channel driver and readout electronics.

Conference Presentation

Citation Download Citation

Wim Bogaerts, Alain Yuji Takabayashi, Pierre Edinger, Gaehun Jo, Iman Zand, Peter Verheyen, Moises Jezzini, Hamed Sattari, Giuseppe Talli, Cleitus Antony, Mehrdad Saei, Cristina Lerma Arce, Jun Su Lee, Arun Kumar Mallik, Saurav Kumar, Marco Garcia, Tigers Jonuzi, Kristinn B. Gylfason, Niels Quack, Frank Niklaus, and Umar Khan "Programmable silicon photonic circuits powered by MEMS", Proc. SPIE 12005, Smart Photonic and Optoelectronic Integrated Circuits 2022, 1200509 (5 March 2022); https://doi.org/10.1117/12.2614213

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