A method for calculating the thickness of transparent thin films based on transmittance spectrum

Xiaoheng Wang; Zhihe Xiao; Xiang Zhou

doi:10.1117/12.2605728

24 November 2021 A method for calculating the thickness of transparent thin films based on transmittance spectrum

Xiaoheng Wang, Zhihe Xiao, Xiang Zhou

Proceedings Volume 12065, AOPC 2021: Optical Sensing and Imaging Technology; 120651L (2021) https://doi.org/10.1117/12.2605728
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

This paper introduces a method for calculating the thickness of thin films by means of transmittance spectrum, especially the ones deposited on the glass substrates. The film thickness iscalculated by this method and compared with the results measured by probe testmethod, the errorsare less than 3%. Compared with the past ones, this method does not need to peel off the substrate and thin films, does not destroy the surface of thin films, and can detect the smoothness and thickness of thin films at any time. It can be widely used in industrial films deposition to improve the production and efficiency.

Citation Download Citation

Xiaoheng Wang, Zhihe Xiao, and Xiang Zhou "A method for calculating the thickness of transparent thin films based on transmittance spectrum", Proc. SPIE 12065, AOPC 2021: Optical Sensing and Imaging Technology, 120651L (24 November 2021); https://doi.org/10.1117/12.2605728

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