Effects of guard-ring’s depth and space on the performance of silicon avalanche photodetector arrays with TCAD simulation

Tiancai Wang; Hongling Peng; Chuanwang Xu; Tao Shi; Jian Chen; Jie Deng; Haizhi Song

doi:10.1117/12.2606691

24 November 2021 Effects of guard-ring’s depth and space on the performance of silicon avalanche photodetector arrays with TCAD simulation

Tiancai Wang, Hongling Peng, Chuanwang Xu, Tao Shi, Jian Chen, Jie Deng, Haizhi Song

Author Affiliations +

Proceedings Volume 12065, AOPC 2021: Optical Sensing and Imaging Technology; 120652N (2021) https://doi.org/10.1117/12.2606691
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

In this paper, we simulated and analyzed the effects of guard-ring’s depth and space on the performance of silicon avalanche photodetector (APD) based on the traditional n⁺-p-π-p⁺ structure. Two shallow trenches (ST) outside of the active region was used as the guard rings and the effects of depth and the spacing between the two ST on the performance of silicon APD arrays was simulated and analyzed. In order to optimize the parameters of the shallow trenches, we calculated the different characteristics of APD under different conditions, including the characteristics of APD such as breakdown voltage, multiplication factor, dark current, photocurrent and so on. The result shows the breakdown voltage and multiplication of APD become higher because of the shallow trench guard-rings and they are related to the PN junction depth.

Citation Download Citation

Tiancai Wang, Hongling Peng, Chuanwang Xu, Tao Shi, Jian Chen, Jie Deng, and Haizhi Song "Effects of guard-ring’s depth and space on the performance of silicon avalanche photodetector arrays with TCAD simulation", Proc. SPIE 12065, AOPC 2021: Optical Sensing and Imaging Technology, 120652N (24 November 2021); https://doi.org/10.1117/12.2606691

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