A high-frequency angular vibration calibration system based on phase modulated laser interferometer technique

Xianfan Wang; Jianhua Yang; Tengchao Huang; Xiaowu Shu

doi:10.1117/12.2602614

24 November 2021 A high-frequency angular vibration calibration system based on phase modulated laser interferometer technique

Xianfan Wang, Jianhua Yang, Tengchao Huang, Xiaowu Shu

Author Affiliations +

Proceedings Volume 12066, AOPC 2021: Micro-optics and MOEMS; 120660C (2021) https://doi.org/10.1117/12.2602614
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

In this paper, we proposed a high-frequency angular vibration calibration system based on phase modulated laser interferometer technique, which can provide the real-time rotation angle measurement with vibration frequency of up to 1000Hz. The optical configuration, operation principle, and phase generation carrier demodulation (PGC) technique of this calibration system are presented. Both theoretical and experimental results demonstrate that our proposed angular vibration calibration system can realize an angle measurement with an amplitude of 0.3” at angular frequency of 1000Hz.

Citation Download Citation

Xianfan Wang, Jianhua Yang, Tengchao Huang, and Xiaowu Shu "A high-frequency angular vibration calibration system based on phase modulated laser interferometer technique", Proc. SPIE 12066, AOPC 2021: Micro-optics and MOEMS, 120660C (24 November 2021); https://doi.org/10.1117/12.2602614

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