This PDF file contains the front matter associated with SPIE Proceedings Volume 12071, including the Title Page, Copyright information, and Table of Contents.

Active Fluid Jet Polishing (AFJP) is used for finishing and correction of complex optical surfaces. The tool influence function is one of the important factors for correction polishing. The existing AFJP polishing pin is rotating around the eccentric axis of polishing tool. Material removal rate at contact center area is much less than the edge. In order to optimize the tool influence function, a new active fluid jet polishing process is proposed, and an innovative polishing pin with helical blade inside was designed, which could rotate around its own axis under the pressure of polishing fluid. By comparing the simulation result of tool influence function with the experiment, the feasibility of the design is verified.

Cylindrical optical element is a common type of aspheric lens, which can realize the transmission, shaping and amplification of the beam in the optical system. It has a wide range of applications, such as linear detector illumination, holographic illumination, optical information processing, strong laser system and synchrotron radiation beamline. In this paper, an efficient robot-assisted rotation-revolution ultra-precision belt grinding technology was presented for cylindrical optical element. First, the structure of device and processing principle of the rotation-revolution belt grinding device was introduced. Then, based on the generalized Preston equation and Hertz contact theory, the removal function of the ultra-precision belt grinding was established. Finally, the cylindrical element of optical glass with a diameter of 50.09mm was ground. After 6 hours of processing, the cylindricity accuracy of the element was decreased from original 112.4μm to 4.6μm, and the surface roughness was decreased from 2.631μm to 3.085nm.

With the application of single point diamond ultra-precision turning technology in optical free-form surface processing, the development of high-frequency large amplitude fast tool servo system has become a research hotspot. In this paper, a double piezoelectric ceramic fast tool servo system is designed. Its performance index is 60μm stroke at 300Hz. In this paper, the structural design principle and processing technology of the system are systematically analyzed. The stiffness analysis of the system were carried out by using the finite element analysis software to verify the performance of the high-frequency response amplitude of the system. In this paper, the key technology research on the structure design of double piezoelectric ceramic fast tool servo system provides the basis for improving the machining accuracy and efficiency of the fast tool servo system.

Aspheric optical elements are increasingly developing towards miniaturization. In the manufacturing process of aspheric lens, it is easy to produce warpage, deformation and other phenomena that affect the optical performance. In this paper, CAE technology is used to model it, and then finite element software is used to analyze its molding process. The effects of melt temperature, mold temperature, injection time, dwell pressure and cooling time on the internal stress of plastic parts are obtained, and the optimal injection parameters are obtained by optimizing the process parameters through orthogonal test. The lens quality is the best when the melt temperature is 300℃, the mold temperature is 80℃, the injection time is 1s, the dwell pressure is 60MPa, and the cooling time is 20s. The simulation results show that the maximum residual stress is 10.18MPa, which meets the requirements of the evaluation index and improves the product quality.

This paper adopts the method of numerical theoretical calculation and experimental simulation. The stress field characteristics under the interaction of 1064nm and 532nm composite pulse laser and single crystal silicon are studied and analyzed. Based on Fourier's heat conduction equation to establish a finite element model of single crystal silicon under composite pulse laser irradiation. Numerical simulation using simulation software, Analyze the stress field distribution generated during the action of single-crystal silicon material under the action of single-pulse laser and composite high-energy pulsed laser. Finally, the stress field distribution law under the irradiation of the composite high-energy pulsed laser is obtained, and when the pulsed laser acts on the target material, the stress field distribution range becomes larger, and the pressure value also increases, and the silicon material is more easily damaged. In order to solve the problem that the distribution of stress field affects the processing effect of monocrystalline silicon in the process of laser processing silicon.

Laser damage identification is one of the hot research issues in recent years. Based on the mechanism of photothermal deflection, this paper established a physical model of reflective photothermal deflection based on laser damage.And designed an experimental test system for offset recognition based on the photothermal deflection method of the four-quadrant detector.The damage test of SiO₂ film was carried out by the "1-0n-1" method specified by the national standard. The probe beam offset under different energies was studied, and the change trend of the detected beam offset during the damage of SiO₂ film was analyzed.The optical properties and damage morphology of the samples were studied, and the damage threshold of SiO₂ film was determined by zero probability damage threshold method.The experimental results show that when the SiO₂ film is damaged by the photothermal deflection damage identification system based on the quadrant detector, when the offset is greater than 0.1mm, the SiO₂ film is considered to be damaged, and the damage threshold is 12.7 J /cm².The deviation of the test result based on the photothermal deflection damage offset of the four-quadrant detector and the test result of the phase contrast microscope method in the international standard ISO11254 is not more than 6.8%.

Ultra-precision turning technology is widely used in the machining process of optical mirrors. Due to the influence of machine motion error, clamping error, tracking error and other factors, ultra-precision turning often deviates from the ideal position during the actual machining process. Various error factors are coupled with each other, and it is difficult to compensate by establishing an accurate error model at present. This paper proposes an optical surface error compensation method based on zernike polynomials. Firstly, the surface error is reconstructed with Zernike polynomials. Then, by analyzing the frequency distribution of the optical surface error, the error corresponding to a specific Zenick coefficient is selected. Finally, based on the fast tool servo system, the original machining path is corrected according to the error compensation strategy. By compensating a Φ100 mm mirror, the surface accuracy is improved from PV 1.83 μm, RMS 0.47 μm to PV 0.38 μm, RMS 0.04 μm. The experimental results show that the error compensation strategy proposed in this paper can significantly reduce the optical surface error and improve the machining accuracy.

In this paper, the bicubic spline interpolation and high-order polynomial methods were used to optimize the edge thickness of negative blended lenticular lens for patients having high myopia and astigmatism, which are large thickness and weight. For -8D lens with -2D cylinder in 180° axis, based on the setting a valid optical area, the outside area of the blended lenticular lens were designed . The optimized lenses were processed by CNC machine, measured and analyzed. The central optical area obtained via bicubic spline interpolation method is 48.98% greater than high-order polynomial method. The maximum thickness obtained using high polynomial method is 0.62% less than that obtained via bicubic spline interpolation method, which is 17.40% less than the original surface in 180° axis. The edge thickness under high polynomial method is 9.60% larger than bicubic spline interpolation method, which is 71.57% less than the original surface in 180° axis. Therefore, it was concluded that the bicubic spline interpolation method meets the requirements of the wearers. These methods are also suitable for designing other types of optical components.

Magnetorheological finishing (MRF) has been widely used in the field of modern optical machining due to the high certainty of processing. In the processing of spherical components, the detection means and sample preparation limit the acquisition of magnetorheological spherical tool influence function. In order to realize the high precision manufacturing of spherical components, the spherical removal function in the magneto-rheological polishing process is simulated and applied in practice. Based on the Preston equation, the material removal of the planar component was analyzed and the plane tool influence function model was established. On this basis, the correlation between spherical removal and plane removal was analyzed, and a simplified spherical tool influence function simulation method was proposed, and its accuracy was verified by experiments. Aiming at the processing of spherical components, the processing technology was improved and the actual processing was carried out. After processing, the PV value of the transmitted wavefront was 0.09λ, and the RMS value was 3.2 nm. The experimental results show that the spherical tool influence function simulated in this paper can be applied in actual processing and obtain a high-quality optical surface.

Due to the complexity and inhomogeneity of the distribution of the middle-spatial frequency errors (MSFE), the existing theoretical models cannot realize the manufacturability prediction of the smoothing process for the MSFE on the largeaperture optical components. Therefore, based on the parameterized time-domain smoothing model and the idea of regional division, a prediction algorithm suitable for the smoothing process of the MSFE in complex periods is proposed in this paper. The relevant verifiable experiments are carried out. The prediction results are in good agreement with the real data, which indicates that the prediction algorithm proposed in this paper can be applied to predict the smoothing process of the MSFE of large-aperture optical components and guide the polishing process.

Analyzed the technical requirements of filter sets applied in 6-channel Quantitative Real-time PCR nucleic acid detection, and these filters meet the requirements were designed with double sides coating on single glass substrate, while each coating was about 200 layers. These coatings were manufactured on a plasma-assisted reactive magnetic sputtering (PARMS) machine, and the thickness error is less than 0.1%. Finally, the transmittance rates of these 6-channel real-time fluorescence PCR filters are <93%, the cut-off steepness was less than 1%, and the crosstalk was less than 1% in polychromatic fluorescence PCR.

Based on the motion mechanism of double-sided polishing, the motion trajectory model of polishing pad relative to medium-aperture optical components was established. This research simulated the trajectory of the abrasive particle relative to the optical component, and then the trajectory was obtained under different processing parameters. Based on the simulation results, different processing parameters were optimized which had been used for double-sided polishing experiments of optical components. The surface roughness and figure of both sides of the optical component after double-sided polishing were detected. The detection results showed that the surface roughness approached 0.5nmRMS, and the surface figure was 0.5λ(λ=632.8nm) for 150mm×150mm×7mm specification medium-aperture optical components.

Modulation transfer function（MTF）quantitatively characterizes the quality of the optical imaging system. On the basis of the ISO12233:2017 standard, a method for fitting super-sampled edge spread function (ESF) with three Fermi functions based on dynamic initial values is proposed, and the Canny algorithm with automatic threshold is used to detect the edge line. The proposed method dynamically adjusts the initial parameter values of the three Fermi functions obtained by the empirical formula, and uses the least squares method to fit the super-sampled ESF data. Compared with the ISO12233:2017 standard, the proposed method greatly reduces the influence of noise, which is mainly reflected in edge detection and the super-sampled ESF obtained from the projection of the image data. Simulation experiments are conducted on images with different blur and noise levels. The results show that compared with the method of empirical formula to get the initial fitting value, the proposed method is superior to the former in accuracy and scope of application. The experimental setup of MTF is established, and the same conclusion is obtained in actual measurement.

As a precision instrument of wavelength magnitude, interferometer plays an important role in the production of optical lenses, and it is an important instrument for optical profile detection. Based on the polarization Twyman-Green interferometer, the experimental device of surface detection is built. By analyzing the problems in the experimental process, the following improvements are made on the original basis: firstly, when using the dual optical path system to collect fringes, it is found that the interference of air has a great impact on the image quality, so we refer to the principle of Fizeau interference, In order to improve the anti-interference ability of the whole system, the double optical path structure of the Twyman-Green interferometer is combined into a common optical path structure. Secondly, because the detection aperture and surface type will be greatly limited by the standard mirror, so based on the previous research of the research group, this design designs a large F number and long focal length standard mirror for the detection of different lenses, especially the convex mirror. Finally, in order to improve the contrast of interference fringes, a plane mirror film with suitable transmittance and reflectance ratio is designed by using optical coating software to improve the contrast of interference fringes.

The large diameter and long focal length collimator can be used to measure the parallelism between the various optical axes of multi-axis photoelectric system. After moving, vibration or change of ambient temperature, the collimator components location will change, and its own parallelism will disorder. Outside the laboratory, it's difficult to recalibrate the disorder collimator. This will directly affect the reliability of the collimator measurement results. In this paper, a self-calibration method was proposed, the collimator structure was optimized, CCD detection imaging was introduced and self-calibration component was designed. The radial calibration and depth of focus calibration principles were studied in collimator. Based on this, a set of collimator will be developed, which can measure the optical axis parallelism and its own parallelism included. When the collimator own parallelism disorders in the use of an external field, it's easier to finish the self-calibration in the scene. The measurement accuracy of the instrument can be ensured. A set of sun fleck positioning system software will be programmed, and it can be used to coordinate with self-calibration and measuring the optical axis parallelism function in the collimator. The study in this paper has important practical significance for scientific research and engineering experiments.

Hard-brittle thin-walled tubular optics are widely used in the field of high-power solid-state lasers. The 3D accuracy requirement and the clamping deformation of the hard and brittle thin-walled structure pose a great challenge for ultra-precision manufacturing. In this paper, fused silica thin-walled tubular optics with the length of 100mm, the inner diameter of 42mm and the outer diameter of 50mm were fabricated successfully through ultra-precision grinding. The profile accuracy of PV1.6μm, the surface roughness of Ra10nm, the straightness of 1.64μm, the roundness of 1.62μm and the cylindricity of 2.13μm were achieved through in-place dressing of grinding wheel, on-machine measurement, off-line measurement, and the iterative compensation machining. The technical difficulties of ultra-precision manufacturing of hard brittle thin-walled optics have been overcome.

In order to measure the local phase modulation characteristic of a phase-only reflective Liquid crystal spatial light modulator (LCSLM) and accurately evaluate the nonuniformity of phase modulation, a Twyman-Green interferometer is built to simultaneously measure the local phase modulation of multi-region in LCSLM. A series of carrier fringe patterns can be captured, which is modulated by the local control pattern loaded to the LCSLM. The phase distribution from all fringe patterns are extracted respectively with the Fourier transform method. By calculating the variance values of all phase values in each pixel position, a phase variance matrix is obtained. Then the regions of interests (ROIs) from the fringe pattern are extracted with the Otsu segmentation algorithm and the connected region labeling algorithm. At last, the phase modulation of local regions is obtained synchronously with the phase-shift algorithm based on Fourier transform method. The proposed method can greatly improve the measuring efficiency and reduce the environmental impact to great degree.

A method based on the local gradient direction information is proposed to locate the center of circular fringe. The new method is developed which based on the idea that the normal directions of any point on the circular fringe are always pointing towards the center. Besides, the local gradient direction of fringe is related to the normal line of fringe. We deduce theoretically the principle of local gradient direction estimation. Then a new circular fringe center location algorithm is developed with the help of digital image processing technology and statistical ideas. The simulation results show that new method can locate accurately the center of different types of circular fringes with less or without filtering. It also holds good robustness and can meet the requirements of actual engineering application.

In phase-shifting interferometry, phase unwrapping is an important algorithm for obtaining actual detection data. In general, fringe contrast is approximated to reduce the difficulty of operation. However, in the actual white light interference detection, the fringe contrast will vary with the change of the optical path difference as the wavelength is more abundant. In this paper, the three-step phase-shifting algorithm is taken as an example to derive the phase expression of the white light interference fringe contrast without approximation processing. A hemisphere with a radius of 10μm and an irregular object with a size of less than 6μm are applied to topography reconstruction. Compared with the topography reconstruction error of the three-step phase-shifting algorithm before and after the correction, it has proved that the three-step phase-shifting algorithm after the correction can increase the reconstruction accuracy by about two times, which provides a theoretical method to improve the reconstruction accuracy of the phase-shifting algorithm.

In this paper, industrial robot is used as motion carrier and self-developed flexible wheel tool is used as polishing tool to realize low-cost, high-efficiency, and high-precision optical processing. Firstly, the mapping formula between the workpiece coordinates and the road point coordinates is deduced, and the position and posture data required for robot programming are obtained. Secondly, a new type of wheel polishing tool is designed, which controls the polishing pressure through a pneumatic floating structure to ensure the stability of the removal function. Finally, an off-axis paraboloid of φ345mm was processed using this technology. After three times of processing for 10 hours, the surface error converged from PV-2.111λ, RMS-0.249λ to PV-0.119λ, RMS-0.01λ. PV and RMS converged by 94% and 96%, respectively. This proves that the technology has the advantages of high efficiency and high precision, and is expected to be widely used in the field of precision optical processing.

BK7 optical glass is widely used as aerospace optical window. Precision grinding is a common method for machining BK7 optical elements. CVD diamond grinding wheel is a cutting tool with excellent wear resistance, which can realize high efficiency grinding for BK7. However, due to its small chip space, the surface quality will be affected by the large grinding force and difficult chip removal. In this paper, micro-grooves with different angles and widths were fabricated on CVD diamond grinding wheel surfaces by picosecond laser to improve the chip space. The grinding experiments of BK7 were carried out using these micro-structured wheels. The results show that the grinding force was reduced by 80% at most compared with the unstructured wheel, and the machined surface roughness was also decreased by up to 85%. The grinding force of structured CVD diamond grinding wheel decreases with the increase of the surface micro-structure groove angle. With the increase of groove width on the surface of structured CVD diamond grinding wheel, the surface roughness of the workpiece decreases first and then increases. When the groove width is 80μm, the surface roughness of the workpiece reaches the minimum value.

Mid-spatial frequency errors can lead to self-focusing and power loss in a high-power laser. This paper describes the use of a binary phase computer generated hologram (CGH) to measure the mid-frequency wavefront of lens with long focallength. Thus, the designed CGH can provide reference aspheric wavefront with high-precision, in the meantime greatly shorten air space, thereby reducing the effect of vibration and air turbulence. Moreover, the use of power spectral density (PSD), structure function (SF) and autocorrelation function (ACF) for the specification and characterization of lens midfrequency wavefront are presented. The direct relationship between PSD, SF and ACF are analysed by the quantitative evaluation of the wavefront aberration. Analysis of different evaluation method help to understand the light transmission characteristics, and the area structure function and autocorrelation function can be complementary methods for specifying and representing the spatial content of optical surface errors.

Digital holographic microscopy is an ideal non-invasive, non-contact, and fast-response 3D measurement method. The strong coherence of the laser leads to irregularly distributed speckle noise during the digital holographic recording process, which affects the 3D reconstruction of the digital holographic microscopy system. To solve this problem, the coherence of the laser is changed by diffusion glass rotation to achieve the suppression of the speckle noise in the digital holographic measurement system. Firstly, a theoretical model of a digital holographic microscopy system based on the diffusion glass rotation is established. Then, the influence of diffusion glass rotation speed on coherence time, speckle contrast, fringe contrast, signal-to-noise ratio are simulated and analyzed, the optimal rotation speed of the digital holographic microscopy system is obtained. Finally, The speckle noise suppression system based on the Mach-Zehnder interference model is established, and the optimal parameters of the diffusion glass rotation are set, which verifies that the method is suitable for high-precision measurement.

The uniformity of illumination can affect the detection ability of the Shack-Hartmann wavefront sensor to a certain extent and degrade the wavefront restoration accuracy. When the intensity distribution of the incident beam is very non-uniform, it is difficult for each sub-spot image to carry out optimal signal-to-noise ratio (SNR) at the same time. The spot image may be over-exposed or too dark, and that brings about the incorrect measurements of the centroid and further influences the reconstruction accuracy of the wavefront. In the paper, we use multi-frame image information fusion to generate an enhanced spot-array image with a high dynamic range, so as to improve the accuracy of the overall centroid calculation. The simulation results show that this method is effective in the above cases.

We present a method for measuring the polarization extinction ratio of a prism with the heterodyne-detecting. The key of this method is converting the intensity difference of more than one million times between vertical and parallel polarized transmitted light to almost equal level, so as to overcome the difficulty of measuring the intensity of both vertical and parallel components in the linear response range of a normal photodetector without attenuation. Using this method, we have realized the measurement of a polarizing Glan-Taylor prism with extinction ratio of 60.4dB.

Silicon aspherical optics are of widely used these years with the development of the improvement of optical manufacturing and testing technologies. Single point diamond turning for silicon aspherical optics can obtain high surface precision. However, the surface microscopic quality is difficult to reach the ideal specification, caused by the limitation of material characteristics. An experimental study on the combined manufacturing technology of single point diamond turning and polishing has been carried out and proposed in this paper. The optimum turning parameters of the main factors affecting the micro-nano quality of silicon diamond turning surface, such as cutting depth, spindle speed and feeding speed, were obtained by orthogonal experiments. After polishing, the surface roughness was reduced from 5.35 nm to 1.16 nm. Meanwhile, the PSD was improved obviously. The combined manufacturing technology can be applied for high precision silicon aspherical optics.

An efficient optimal designing method for a quantitative dispersive objective lens used in line-scanning chromatic confocal displacement sensor was discussed. A multi-configuration optical system consisted of paraxial and diffractive surfaces was proposed to realize the quantitative inverse linear dispersion distance in the wide FOV. The ideal optical model was used as the objective FOV for the design of dispersive lens in the inverse optical path. The multi-configuration with the axial quantitative dispersion was implicit in the single configuration optical path, so that the image plane becomes a unified reference plane for image quality evaluation. With this method, a dispersive objective lens of 580nm-780nm working wavelength band and 0.37 mm axial dispersion distance was designed, which the line-scanning width is 16 mm and the dispersive linearity is better than 0.9997.

Optical freeform surfaces can provide a higher degree of freedom in optical design, compared with spherical and aspherical optical components. The application of freeform optical components in imaging optical systems is conducive to simplifying the system structure and improving imaging quality, and has wide applications in illumination, imaging and non-imaging, etc. This paper introduces the basic principle and process of fast tool servo (FTS) diamond turning, and its application in the field of optical processing. A series of machining experiment was carried out on aluminum materials by FTS diamond turning for XY polynomial freeform surface mirrors, and the surface accuracy and roughness were measured. The effects of feed rate, spindle speed, and cutting depth on surface roughness were studied and corresponding functional relationship curves were determined. The results show that the feed rate had the greatest influence on surface roughness of aluminum freeform surfaces, as the feed rate increased, the surface roughness increased gradually; the spindle speed and cutting depth have relatively little influence on surface roughness. The fitting degree of curves was very high, which can predict the surface roughness of machined freeform more accurately. The 3-D surface accuracy PV of the final processed freeform surface was 0.22μm, and the 2-D surface roughness Ra value was 3.5nm, the machined surface reached a mirror finish.

With the development of intelligent manufacturing, the role of industrial robots is becoming more and more important. However, the relatively low absolute positioning accuracy limits industrial robot application in high precision manufacturing. The main reason for the low positioning accuracy of industrial robots comes from the series configuration and insufficient stiffness, which leads to large motion errors. This paper proposed an error compensation method based on BP neural network combined with industrial robot stiffness model. Firstly, the relationship between the joint angles, the space stiffness and the error of the industrial robot is established through the stiffness model. Then, the neural network training set was constructed based on the experimental data and the simulation data from the established stiffness model. Finally, based on the training results of BP neural network, the spatial positioning error of the 6-DOF industrial robot was measured and compensated. Experimental results show that the error compensation method based on BP neural network increases the position accuracy by 95%, and the spatial position error is reduced to less than 0.005mm. This validates that the working performance and accuracy of the industrial robot can be improved, which is helpful for the further application of industrial robot in precision machining and measurement.

Single crystal silicon (sc-Si) is a typical infrared optical material with good heat resistance and high infrared transmittance which is widely used in infrared optical systems , aerospace and other fields. However, due to the higher hardness and lower fracture toughness of this material, brittle fracture is very prone to occur during single-point diamond machining, resulting in poor surface finish and roughness. Hence, like ceramics, and composites, the machining of this alloy is considered as difficult-to-machining materials. Micro-laser-assisted machining (μ-LAM) method has become a promising solution in recent years to lessen cutting stress when materials that are considered difficult-to-machining, such as sc-Si and ZnSe are employed. This paper investigated the influence of input variables of μ-LAM on the machinability aspect of the sc-Si. The influence of cutting parameters on surface roughness in LAM is studied by orthogonal experiment, and optimal processing conditions are obtained. The second-order regression model of process parameters and surface roughness was established by response surface method. The results show that the change of cutting depth had little effect on surface roughness, the spindle speed and feed speed were main factors affecting the surface roughness. According to the 3D response surface, the interaction between different factors had a significant effect on surface roughness. The optimal combination of process conditions were a spindle speed of 4000rpm, a feed speed of 2mm/min and a cutting depth of 5μm.

With the rapid development of national defense, aerospace and other fields, the demand for high precision and high quality photoelectric products is increasing day by day, and these photoelectric products are gradually developing toward miniaturization. If the optical elements use a free-form, the imaging quality of the optical imaging system can be greatly improved, and the illumination uniformity of the optical illumination system and the transmission efficiency of the information transmission system can also be remarkably improved. With free-form optics becoming the leading representative technology of advanced optical engineering, optical metrology technologies for free-form optics has become the hotspot research of current science-technology development. In this paper, the development of optical metrology technologies, the present situation and the advantages and disadvantages of various metrology technologies are described in detail, which will be of guiding significance for future research on optical metrology technologies for free-form optics.

The optical element’s figure error can be express as Fringe Zernike polynomial and vector form, based on the vector wavefront aberration theory, the figure error of optical element induced aberration’s characteristic of optical system has been analyses in this paper. The figure error on stop aperture affects all the field angles equally and induced the same type aberration as figure error. If the surface of optical element is not the pupil of optical system, the aberration observed in the focal plane is different from the figure error itself, it will not only induced the same type aberration as figure error but also induced lower order aberration in the optical system, the relationship between aberration and field of view is different and the location zero for the lower order aberration always reside at the center of the field of view.

According to the requirements of large aperture optical imaging quality test for vacuum environment simulation device, this paper briefly describes the corresponding solutions, so that it has the ability of large aperture space optical load thermal optics, thermal balance, thermal vacuum environment test, and the ability of optical index test and calibration in atmosphere and high vacuum environment，, and provides a new generation of building with larger aperture optical load environment simulation facilities effective theoretical basis and strong feasibility proof.

Weak-rigid components have a wide range of applications in the fields of aerospace, vehicle and ship power. They have the characteristics of high accuracy, poor rigidity, and easy deformation. The uncertainty of their deformation has an important impact on the overall performance and subsequent use of the equipment. Weak-rigid plates are one of the most common types of weak-rigid components. At present, the research on weak-rigid plates mainly focuses on the deformation control of the workpiece during processing, and there are relatively few studies on the measurement of comprehensive parameters. The surface profile parameters of the weak-rigid plate will reflect the performance and processing quality of the weak-rigid plate. In this paper, a comprehensive index measuring device for weak-rigid components based on dispersion confocal sensor and a stress change test system for weak-rigid components based on dynamic interferometer are used to accurately measure the surface profile of weak-rigid plates, which provides a basis for its process parameters and subsequent assembly use. It provides a reference for the subsequent measurement of the surface profile and thickness of weak-rigid curved components.

High-precision optical systems are increasingly being used in military, civil and aerospace fields. Computer numerical control small grinding head grinding technology, performing as an efficient ultra-precision machining method, has been widely used in the field of mirror processing and manufacturing. High-precision detection of the surface shape is a key step to ensure the quality of the precision processing of optical mirrors. This can be quickly and effectively achieved by on-site measurement, therefore improving processing efficiency. A method called reverse Hartmann test was proposed for ultra-precision grinding machine tools. This method not only ensures high detection accuracy, but also has the advantages of simple structure, high detection efficiency, and strong robust ability, which can be used to perform the on-site measurement inside the grinding machine tools. According to the application conditions, the actual reverse Hartmann surface shape on-site detection system was built inside the small grinding head machine tools, and the on-site measurement of the 250mm flat mirror was completed within 3 minutes. The surface shape measurement repeatability was better than λ/37, which proved the efficiency and feasibility of reverse Hartmann test shape on-site detection system.

With vigorous development of modern optical manufacturing in the direction of intelligence and precision, coupled with the continuous increase in the diameter of optical components and continuous improvement of precision requirements, industrial robot polishing technology has a wide range of application scenarios and broad development space in the field of optical manufacturing. The integration of processing and measurement is a key technology to improve the reliability and intelligence of precision manufacturing. Therefore, the research and development of in-situ measurement technology has become an important trend in the field of optical manufacturing. A measurement method based on deflectometry is a type of surface gradient measurement method that has been proposed and developed in recent years. Due to the advantages of superior simplicity, stability, and high dynamic range, it is promising for the in-situ measurement of optical surfaces. Based on monoscopic deflectometry, this paper develops an in-situ measurement device for industrial robot polishing system. The key problems of phase decoupling and optical path correction of transparent components are being researched, and high-precision double-surface measurement of transparent optical elements is realized, which is of great significance to the intelligent manufacturing of key optical elements.

Jet polishing plays an important role in ultra-precision machining. In this paper, the effects of slotted and slotless nozzles on micro jet machining are investigated. The pressure distribution and magnitude of the two nozzles on the workpiece were first calculated by finite element simulation software. Then a set of comparative tests were conducted on two single crystals of silicon. The results showed that the pressure distribution of the slotless nozzle was more uniform compared to the slotted nozzle, and the pressure value of the slotless nozzle on the surface of the workpiece was greater. In addition, the slotless nozzle is more capable of improving the surface roughness of the workpiece in the same time.

In infrared optical system, changes of the reflective index will result in a decrease in imaging quality. Therefore, athermalized treatment is necessary. Chalcogenide glasses (As₄₀Se₆₀) are the ideal material for thermal aberration correction in infrared optical systems, which have excellent infrared optical properties, especially the transmission performance and temperature characteristics. However, thermal deformation is inevitable for chalcogenide glasses in the coating process, which is a major cause of quality deterioration. In this paper, a deep cryogenic treatment with a series of specific parameters is carried out and a comparative experiment is conducted. The result shows that the thermal stability of chalcogenide glass in the coating process is improved markedly after deep cryogenic treatment. The thermal deformation of the optical surface is reduced and the surface accuracy is controllable.

This paper presents a multi-carrier frequency spatial phase shift digital shearing speckle interferometry method which is capable of the first derivative and microdeformation synchronously. The dynamic deformation of the composite defects is carried out by thermal loading.The shear speckle interferometry is used to locate the defect position and holography was used to measure microdeformation of the defect. In Michelson shearing device, an optical fiber is used to introduce a reference beam,two shear images form a shear fringe pattern, and the reference beam introduced is combined with one of the shear patterns to generate a hologram. The spatial phase shifting technique is used to obtain the frequency domain after Fourier transform, holograms and shearograms are obtained at the same time. In this paper, the direct synchronous measurement of microdeformation and first derivative of deformation is realized without the need of numerical integration process. Finally, the experimental results show that the proposed method can quickly obtain the shear fringe image, which represents the first derivative of the deformation to position the defect in the composite material, and the hologram is filtered, unwrapped and 3D displayed to obtain accurate micron scale deformation values.