Raman spectroscopy and its applications in semiconductor processing

M. De Biasio; T. Arnold

doi:10.1117/12.2632908

31 May 2022 Raman spectroscopy and its applications in semiconductor processing

M. De Biasio, T. Arnold

Proceedings Volume 12094, Algorithms, Technologies, and Applications for Multispectral and Hyperspectral Imaging XXVIII; 1209411 (2022) https://doi.org/10.1117/12.2632908
Event: SPIE Defense + Commercial Sensing, 2022, Orlando, Florida, United States

Conference Poster

Abstract

Stresses in silicon devices that are introduced during semiconductor processing are a serious concerns in semiconductor fabs. The main sources for stress are doping, surface processing methods and the final chip separation process. Raman spectroscopy is a non-destructive metrology tool that can measure stresses in silicon. Here we present results of Raman analysis that were performed along the different stages of the semiconductor processing chain. In this paper we focused on surface processing and the chip separation process. Our investigations show that micro-Raman spectroscopy is a powerful tool for measuring stress levels and distributions quantitatively on entire productive wafers as well as on the final chip.

Citation Download Citation

M. De Biasio and T. Arnold "Raman spectroscopy and its applications in semiconductor processing", Proc. SPIE 12094, Algorithms, Technologies, and Applications for Multispectral and Hyperspectral Imaging XXVIII, 1209411 (31 May 2022); https://doi.org/10.1117/12.2632908

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available