1 May 1990 Effect of VLSI fabrication errors on kinoform efficiency
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Abstract
Computer simulations are used to investigate the effects of vlsi fabrication errors on the efficiency of kinoforms. Fabrication and error models are described. Simulation results are presented and discussed.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael W. Farn, Michael W. Farn, Joseph W. Goodman, Joseph W. Goodman, } "Effect of VLSI fabrication errors on kinoform efficiency", Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, (1 May 1990); doi: 10.1117/12.17929; https://doi.org/10.1117/12.17929
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