1 May 1990 Light scattering from binary optics
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Abstract
Current pattern data formats for electron beam lithography are specifically designed to meet the needs of the VLSI industry. As a result, pattern data file size is often the limiting factor in the production of a binary computer generated hologram and not the spatial bandwidth product. This paper explores one alternate pattern data format that facilitates the full utilization of the e-beam machine's spatial bandwidth product without introducing prohibitive amounts of pattern data. The pattern data format uses two well established data compression techniques specifically tailored to remove the redundancies present in holographic fringe patterns.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Douglas W. Ricks, Larry V. Chizek, "Light scattering from binary optics", Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, (1 May 1990); doi: 10.1117/12.17925; https://doi.org/10.1117/12.17925
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