1 May 1990 Polar-coordinate laser writer for binary optics fabrication
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Proceedings Volume 1211, Computer and Optically Formed Holographic Optics; (1990); doi: 10.1117/12.17934
Event: OE/LASE '90, 1990, Los Angeles, CA, United States
Abstract
A Laser Writer system for recording centro-symmetric patterns in photoresist has been developed as an alternative method for binary optics mask and component fabrica.- tion.This system is capable of generating binary amplitude patterns with linewidths below 1 tm and with a positional accuracy of less than 0.ljim on up to 3 in. diameter planar substrates. The measured wavefront error and diffraction efficiency of a directwrite two-phase-level F/10 lens confirm that high quality components can be fabricated quickly, easily, and at low cost.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William C. Goltsos, Sharlene A. Liu, "Polar-coordinate laser writer for binary optics fabrication", Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, (1 May 1990); doi: 10.1117/12.17934; https://doi.org/10.1117/12.17934
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KEYWORDS
Spindles

Diffraction

Photoresist materials

Holography

Optical components

Photomasks

Mask making

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