Angular dependence of nanosecond laser-induced periodical surface structure periodicity on silicon

Lei Chen; Chuan Guo; Zelin Liu; Minsun Chen; Zhongjie Xu; Hao Liu; Guomin Zhao; Kai Han

doi:10.1117/12.2609221

15 February 2022 Angular dependence of nanosecond laser-induced periodical surface structure periodicity on silicon

Lei Chen, Chuan Guo, Zelin Liu, Minsun Chen, Zhongjie Xu, Hao Liu, Guomin Zhao, Kai Han

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 1216616 (2022) https://doi.org/10.1117/12.2609221
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

In this work, the laser-induced periodical surface structure (LIPSS) on silicon is generated by 532nm nanosecond laser with pulse duration of 10ns and repetition frequency of 10Hz. The formation of LIPSS is observed under laser fluence of 260mJ/cm² and pulse number of 600 shots with p- and s-polarized laser. For p- polarized laser, when the incident angle is 10°, 20°, 30°, 45°, and 60°, the LIPSS period is 400nm, 743nm, 902nm, 1148nm and 2525nm correspondingly. Besides, the orientation of LIPSS is always perpendicular to the polarization direction of the incident laser. For s- polarized laser, the LIPSS is perpendicular to the polarization direction and the period increases with the incident angle when it is less than 42°. The period is 457nm, 515nm, 549nm and 610nm at incident angle of 10°, 20°, 35°, and 41° correspondingly. when the incident angle exceeds 42°, a set of crossed LIPSSs emerge which are symmetric about the polarization direction. Meanwhile, the period reduces a lot which is around 400nm.

Citation Download Citation

Lei Chen, Chuan Guo, Zelin Liu, Minsun Chen, Zhongjie Xu, Hao Liu, Guomin Zhao, and Kai Han "Angular dependence of nanosecond laser-induced periodical surface structure periodicity on silicon", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 1216616 (15 February 2022); https://doi.org/10.1117/12.2609221

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