Wavelength selective silicon avalanche photodiodes with controlled wide spectral gain by integrating photon-trapping microstructures

Amita Rawat; Ahasan Ahamed; Lisa N. Mcphillips; Busra Ergul-Yilmaz; Cesar Bartolo-Perez; Shih-Yuan Wang; M. Saif Islam

doi:10.1117/12.2637146

3 October 2022 Wavelength selective silicon avalanche photodiodes with controlled wide spectral gain by integrating photon-trapping microstructures

Amita Rawat, Ahasan Ahamed, Lisa N. Mcphillips, Busra Ergul-Yilmaz, Cesar Bartolo-Perez, Shih-Yuan Wang, M. Saif Islam

Author Affiliations +

Proceedings Volume 12200, Low-Dimensional Materials and Devices 2022; 1220005 (2022) https://doi.org/10.1117/12.2637146
Event: SPIE Nanoscience + Engineering, 2022, San Diego, California, United States

Abstract

Silicon avalanche photodiodes (Si-APD) are widely explored due to their high sensitivity, rapid response time, high quantum efficiency, intrinsic multiplication gain, and low signal-to-noise ratio. We present an experimental demonstration of a wavelength selective APD stack epitaxially grown in two different doping orders:–1) N-on-P and 2) P-on-N.We present a performance comparison between N-on-P and P-on-N based on the quantum external efficiency (EQE), Ion/Ioff ratio, and the reverse biased dark state leakage current. By reversing the doping from P-on-N to N-on-P, we show a 40% increase in the EQE. By introducing the photon-trapping hole array we show a 60% improvement in the EQE. We have utilized a low temperature (450oC) forming gas (5% H2 and 95% N2) annealing process to passivate the surface states and show a dark state leakage current improvement from sub- 10nA to sub-1nA current range. The proposed devices are complementary metal oxide semiconductor process compatible and can enable ‘detectors-on-chip’ technology for numerous applications such as internet-of-things, data communication, biomedical imaging, high-speed cloud computing, remote sensing, as well as single-photon detection.

Conference Presentation

Citation Download Citation

Amita Rawat, Ahasan Ahamed, Lisa N. Mcphillips, Busra Ergul-Yilmaz, Cesar Bartolo-Perez, Shih-Yuan Wang, and M. Saif Islam "Wavelength selective silicon avalanche photodiodes with controlled wide spectral gain by integrating photon-trapping microstructures", Proc. SPIE 12200, Low-Dimensional Materials and Devices 2022, 1220005 (3 October 2022); https://doi.org/10.1117/12.2637146

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