Scanning Shack-Hartmann sensor for wavefront measurements on freeform optics

Martin Fuerst; Nikolaus Berlakovich; Ernst Csencsics; Georg Schitter

doi:10.1117/12.2628328

3 October 2022 Scanning Shack-Hartmann sensor for wavefront measurements on freeform optics

Martin Fuerst, Nikolaus Berlakovich, Ernst Csencsics, Georg Schitter

Author Affiliations +

Proceedings Volume 12221, Optical Manufacturing and Testing XIV; 122210T (2022) https://doi.org/10.1117/12.2628328
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

The Shack-Hartmann wavefront sensor has the potential to directly characterize the optical performance of a freeform part by measuring the wavefront transmitted or re ected by the part. However, the traditional Shack- Hartmann sensor's small dynamic range and aperture limit its applicability on strongly curved or extended freeform parts. The combination of a Shack-Hartmann sensor with a highly precise positioning system and a suitable registration algorithm can overcome these limitations. This paper presents an integrated and fully automated measurement system that is based on a scanning Shack-Hartmann sensor, demonstrates the enabled dynamic range extension, and presents measurement results obtained from a microscope objective with a numerical aperture of 0.65. The results show the capability of measuring a wavefront with an opening angle of ±80° and detecting an rms wavefront error of 0:28 λ.

Conference Presentation

Citation Download Citation

Martin Fuerst, Nikolaus Berlakovich, Ernst Csencsics, and Georg Schitter "Scanning Shack-Hartmann sensor for wavefront measurements on freeform optics", Proc. SPIE 12221, Optical Manufacturing and Testing XIV, 122210T (3 October 2022); https://doi.org/10.1117/12.2628328

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE