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1 April 1990 Solid state laser reliability, producibility, and maintenance issues for x-ray lithography applications
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Proceedings Volume 1223, Solid State Lasers; (1990) https://doi.org/10.1117/12.18391
Event: OE/LASE '90, 1990, Los Angeles, CA, United States
Abstract
Laser-design and manufacturing considerations encountered in a micro-lithography application for a solid-state laser system are considered. A solid-state laser utilized in the application incorporates a zig-zag slab laser amplifier in a master oscillator/power amplifier staging configuration that can meet specifications for reliability and performance required for the semiconductor manufacturing industry. The laser staging makes extensive use of anamorphic beam-shaping and image-relaying to extract energy from the slab amplifier efficiently. The mechanical design of the laser structure employs multiple angularly multiplexed beams through a single-slab amplifier in order to minimize the total system volume. Relay spatial filters and maintenance issues are reviewed.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joseph A. Abate "Solid state laser reliability, producibility, and maintenance issues for x-ray lithography applications", Proc. SPIE 1223, Solid State Lasers, (1 April 1990); https://doi.org/10.1117/12.18391
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