Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards

Valeriy V. Yashchuk; Keiko Munechika; Simon Rochester; Weilun Chao; Ian Lacey; Carlos Pina-Hernandez; Peter Z. Takacs

doi:10.1117/12.2633476

4 October 2022 Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards

Valeriy V. Yashchuk, Keiko Munechika, Simon Rochester, Weilun Chao, Ian Lacey, Carlos Pina-Hernandez, Peter Z. Takacs

Author Affiliations +

Proceedings Volume 12240, Advances in X-Ray/EUV Optics and Components XVII; 122400D (2022) https://doi.org/10.1117/12.2633476
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

The reliability of the instrument transfer function (ITF) calibration technique based on binary pseudo-random array (BPRA) standards is investigated and demonstrated in application to interferometric microscopes. We demonstrate the linearity of the calibration (that is, independence of the ITF calibration on the standards root-mean-square roughness) via comparison of the ITF measurements with a number of artifacts with the etched depth varying from 30 nm to 120 nm. We also show that the calibration does not depend on the surface reflectivity, at least in the range between ~36% and ~80%. The criteria for selection of the geometrical parameters of the BPRA standard design appropriate for a particular interferometric microscope arrangement (including optical magnification), as well as the data acquisition and analysis procedures for different applications are also discussed.

Conference Presentation

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Valeriy V. Yashchuk, Keiko Munechika, Simon Rochester, Weilun Chao, Ian Lacey, Carlos Pina-Hernandez, and Peter Z. Takacs "Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards", Proc. SPIE 12240, Advances in X-Ray/EUV Optics and Components XVII, 122400D (4 October 2022); https://doi.org/10.1117/12.2633476

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