Design studies of a high-pulse excimer Eurolaser

Wilhelmus J. Witteman; Frederik A. van Goor; G. B. Ekelmans; M. Trentelman; Gerard J. Ernst

doi:10.1117/12.18479

1 June 1990 Design studies of a high-pulse excimer Eurolaser

Wilhelmus J. Witteman, Frederik A. van Goor, G. B. Ekelmans, M. Trentelman, Gerard J. Ernst

Proceedings Volume 1225, High-Power Gas Lasers; (1990) https://doi.org/10.1117/12.18479
Event: OE/LASE '90, 1990, Los Angeles, CA, United States

Abstract

Design considerations concerning a high power XeCl excimer laser are described. The subsystems to be investigated are the gas flow circulating system with a homogeneous velocity profile and thin boundary layers near the electrodes, a pulse power circuit scheme that takes care of an efficient stable discharge and the X-ray preionization source with a high repetition rate electron beam cathode. Pulse compression technology at high repetion rate plays a key role in the laser performance.

Citation Download Citation

Wilhelmus J. Witteman, Frederik A. van Goor, G. B. Ekelmans, M. Trentelman, and Gerard J. Ernst "Design studies of a high-pulse excimer Eurolaser", Proc. SPIE 1225, High-Power Gas Lasers, (1 June 1990); https://doi.org/10.1117/12.18479

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