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1 June 1990 Design studies of a high-pulse excimer Eurolaser
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Proceedings Volume 1225, High-Power Gas Lasers; (1990)
Event: OE/LASE '90, 1990, Los Angeles, CA, United States
Design considerations concerning a high power XeCl excimer laser are described. The subsystems to be investigated are the gas flow circulating system with a homogeneous velocity profile and thin boundary layers near the electrodes, a pulse power circuit scheme that takes care of an efficient stable discharge and the X-ray preionization source with a high repetition rate electron beam cathode. Pulse compression technology at high repetion rate plays a key role in the laser performance.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wilhelmus J. Witteman, Frederik A. van Goor, G. B. Ekelmans, M. Trentelman, and Gerard J. Ernst "Design studies of a high-pulse excimer Eurolaser", Proc. SPIE 1225, High-Power Gas Lasers, (1 June 1990);


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