1 July 1990 Fabrication of acousto-optic modulators on GaAs substrates
Author Affiliations +
Proceedings Volume 1230, International Conference on Optoelectronic Science and Engineering '90; 123004 (1990) https://doi.org/10.1117/12.2294641
Event: The Marketplace for Industrial Lasers 1990, 1990, Chicago, IL, United States
Abstract
Acousto-optic modulators were fabricated on the GaAs substrates. Low loss hetero- structure GaAs/AlGaAs waveguides of 0.8 dB/cm at 1.3 pm wavelength have been fabricated by the use of the MBE method. ZnO film was then deposited on the waveguides by r.f. sput- tering. A pair of interdigital transducers (IDTs) was made on the ZnO/GaAs waveguides using conventional photolithography and lift-off technique. The total insertion loss measured at a central frequency of 25.37 MHz was 20 dB. Fresnel lens was used to focus and collimate the laser beams. The Ge photodiodes were used attached to the A-O devices as the detectors. Finally the integrated A-0 modulators were made and studied.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y. K. Su, Y. K. Su, } "Fabrication of acousto-optic modulators on GaAs substrates", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 123004 (1 July 1990); doi: 10.1117/12.2294641; https://doi.org/10.1117/12.2294641
PROCEEDINGS
4 PAGES


SHARE
Back to Top