1 July 1990 Optical properties and annealing behaviors of amorphous silicon phosphorus alloy films
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Proceedings Volume 1230, International Conference on Optoelectronic Science and Engineering '90; 12300P (1990) https://doi.org/10.1117/12.2294662
Event: The Marketplace for Industrial Lasers 1990, 1990, Chicago, IL, United States
Abstract
Based on the structural analysis of a-SiP:H alloy films prepared by the GD method, we have investigated their optical gap and refractive index as a function of compositions,and report here a preliminary study of their change rules of reflectivity and absorption in the processes of optical characteristic change and phase change, respectively.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianping Zhou, Jianping Zhou, } "Optical properties and annealing behaviors of amorphous silicon phosphorus alloy films", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12300P (1 July 1990); doi: 10.1117/12.2294662; https://doi.org/10.1117/12.2294662
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