1 July 1990 Coarse grating precision displacement measuring system with opto-scanner
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Proceedings Volume 1230, International Conference on Optoelectronic Science and Engineering '90; 12301U (1990) https://doi.org/10.1117/12.2294703
Event: The Marketplace for Industrial Lasers 1990, 1990, Chicago, IL, United States
Abstract
A coarse grating precision displacement measuring system is described in the paper. The system consists of an opto-scanner used as a displacement sensor, a simple optical system, a large pitch reflecting coarse grating (X=0.635mm) and signal processing circuits etc. After describing the opto-scanner briefly, the paper expounds the principle of the system, the schematic circuits and the theory of dynamic phase discriminating and subdivision. Experiment results is satisfactory.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xianghui Yuan, Xianghui Yuan, } "Coarse grating precision displacement measuring system with opto-scanner", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12301U (1 July 1990); doi: 10.1117/12.2294703; https://doi.org/10.1117/12.2294703
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