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It is well known that the characteristics of Moire signals: Contrast(C), Sinusoidally(S), and the sensitivity of the light intensity to the variation of air gap between the two gratings(H) are the main factors affecting the accuracy of dual gratings measuring system. The paper presents a general formulation concerning the diffraction light intensity from dual gratings, and discusses the characteristics of diffraction pattern.
Bin Du
"The characteristics of Moire signals in diffraction from super-imposed dual gratings", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12302D (1 July 1990); https://doi.org/10.1117/12.2294722
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Bin Du, "The characteristics of Moire signals in diffraction from super-imposed dual gratings," Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12302D (1 July 1990); https://doi.org/10.1117/12.2294722