1 July 1990 The basic operation principle of measurement system of a phase grating of non-Moire fringe, single-grating and modulation of multiphase light
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Proceedings Volume 1230, International Conference on Optoelectronic Science and Engineering '90; 12302I (1990) https://doi.org/10.1117/12.2294727
Event: The Marketplace for Industrial Lasers 1990, 1990, Chicago, IL, United States
Abstract
This paper presents a new type of grating measuring system. Its light source is encoded multiphase pulse linear arry light source. It only has a scale grating with wide pitch, does not use Moire fringe, and only has a single-ended output. Its signal process system uses frequency tracking measurement circuit. this paper centred on analysis the basic operation principle of measurement system, also explained the function of filter and demodulation of the silicon photoelectric generator to output signal I(x,t) by use of transfer function and amplitude-frequency characteristic of the silicon photoelectric generator from automatic control theory.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zengyao Zhang, Zengyao Zhang, } "The basic operation principle of measurement system of a phase grating of non-Moire fringe, single-grating and modulation of multiphase light", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12302I (1 July 1990); doi: 10.1117/12.2294727; https://doi.org/10.1117/12.2294727
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