1 July 1990 An automatic recording laser interferometer for verifying standard scales to 3 meters
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Proceedings Volume 1230, International Conference on Optoelectronic Science and Engineering '90; 12303P (1990) https://doi.org/10.1117/12.2294770
Event: The Marketplace for Industrial Lasers 1990, 1990, Chicago, IL, United States
Abstract
A description is given of an automatic recording Laser interferometer for verifying inval leveling rod up to 3 meter. The interferometer adopts a novel optical system for Abbe's error compensation instead of the contraditional Eppenstein's system. The interferometer mainly consists of two parts: the dynamic photoelectric microscope and the parallel length measurement system. When the instrument operates, electric pulses which correspond to the central positions of lines are produced by the zero crossing method. By means of an interface unit, the electric pulses can control the interferometer to record the measuring length values correspondent to the control positions of the lines. And then the measuring length values are inputted the computer for processing and printing automatically. The experiments show that(1) the interval positioning accuracy of the microscope is better than ± 2p. m. (2) overall accuracy of the instrument is better than ± 7µ m.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hongyan Diao, Hongyan Diao, } "An automatic recording laser interferometer for verifying standard scales to 3 meters", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12303P (1 July 1990); doi: 10.1117/12.2294770; https://doi.org/10.1117/12.2294770
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