1 July 1990 Development of a lasers sphere-surface interferometer
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Proceedings Volume 1230, International Conference on Optoelectronic Science and Engineering '90; 12304A (1990) https://doi.org/10.1117/12.2294791
Event: The Marketplace for Industrial Lasers 1990, 1990, Chicago, IL, United States
Abstract
The laser sphere-surface interferometer is mainly composed of spherical interference system, the interference system for length measuring and electronic counting display.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yan Guo, Yan Guo, } "Development of a lasers sphere-surface interferometer", Proc. SPIE 1230, International Conference on Optoelectronic Science and Engineering '90, 12304A (1 July 1990); doi: 10.1117/12.2294791; https://doi.org/10.1117/12.2294791
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