Increasing the spatial resolution of direct laser writing by using a non-Gaussian intensity distribution in the writing laser spot

Roman I. Kuts; Ekaterina O. Mandrusova; Andrew G. Sedukhin; Ekaterina V. Bronnikova; Victor P. Korolkov

doi:10.1117/12.2643710

19 December 2022 Increasing the spatial resolution of direct laser writing by using a non-Gaussian intensity distribution in the writing laser spot

Roman I. Kuts, Ekaterina O. Mandrusova, Andrew G. Sedukhin, Ekaterina V. Bronnikova, Victor P. Korolkov

Author Affiliations +

Proceedings Volume 12318, Holography, Diffractive Optics, and Applications XII; 123180O (2022) https://doi.org/10.1117/12.2643710
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

Due to the threshold nature of the thermochemical oxidation process, it is possible to use a non-Gaussian intensity distribution within the writing spot, for increasing of spatial resolution of direct laser writing technology. The non-Gaussian distribution was obtained by distorting the Gaussian beam with an annular diaphragm. The width of the central peak (FWHM) is 40% smaller than the width of the Gaussian spot. It has been shown that by distorting the Gaussian spot, a smaller single line width can be obtained. The effect of side lobes during multipass writing on the width of the resulting single line was studied.

Conference Presentation

Citation Download Citation

Roman I. Kuts, Ekaterina O. Mandrusova, Andrew G. Sedukhin, Ekaterina V. Bronnikova, and Victor P. Korolkov "Increasing the spatial resolution of direct laser writing by using a non-Gaussian intensity distribution in the writing laser spot", Proc. SPIE 12318, Holography, Diffractive Optics, and Applications XII, 123180O (19 December 2022); https://doi.org/10.1117/12.2643710

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