Calibration of digital speckle pattern interferometry based on three-axis angle motions measurement theory

Yang Yan; Sijin Wu; Lili Shi; Weixian Li; Juanning Si; Haisha Niu

doi:10.1117/12.2642029

19 December 2022 Calibration of digital speckle pattern interferometry based on three-axis angle motions measurement theory

Yang Yan, Sijin Wu, Lili Shi, Weixian Li, Juanning Si, Haisha Niu

Author Affiliations +

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123190L (2022) https://doi.org/10.1117/12.2642029
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

Digital speckle pattern interferometry (DSPI) is a full-field optical testing technique that can be used to measure tiny deformations and strains. It has been widely used in aerospace, precision manufacturing and other fields. However, the lack of effective calibration method has prevented the wider adoption of this technique. In the measurement process of DSPI, there are phase shift errors, phase noise, phase map processing algorithm errors, geometric sensitivity factors miscalibration, etc., which will lead to the final measurement error. Item-by-item calibration of the aforementioned error sources faces many difficulties in implementation and does not work well. Comprehensive calibration would be a better solution to minimize the measurement error but it is hard to perform due to the lack of suitable references for deformation measurement. In this paper, a comprehensive calibration method based on the theory of three-axis angle motions measurement using DSPI has been proposed. The tiny three-axis angle motions are loaded by Piezoelectric actuators and measured using a DSPI device based on the DSPI three-axis angle motions measurement theory. A multi-axis interferometry is used to measure the three-axis angle motions simultaneously and its output is used as the measurement reference. Because the angle motions of a rigid body instead of the deformations of an elastic body are measured, the measurement reference is readily available, yielding the successful precision calibration of the DSPI.

Conference Presentation

Citation Download Citation

Yang Yan, Sijin Wu, Lili Shi, Weixian Li, Juanning Si, and Haisha Niu "Calibration of digital speckle pattern interferometry based on three-axis angle motions measurement theory", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123190L (19 December 2022); https://doi.org/10.1117/12.2642029

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