The influence of phase-shifting algorithms on the instrument transfer function in a Fizeau interferometer

Xu Zhang; Qi Lu; Tianzhu Xu; Ying Sun; Shijie Liu; Dmitry Silin; Ilya Kozhevatov; Efim Khazanov

doi:10.1117/12.2646041

19 December 2022 The influence of phase-shifting algorithms on the instrument transfer function in a Fizeau interferometer

Xu Zhang, Qi Lu, Tianzhu Xu, Ying Sun, Shijie Liu, Dmitry Silin, Ilya Kozhevatov, Efim Khazanov

Author Affiliations +

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123190O (2022) https://doi.org/10.1117/12.2646041
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

The phase-shifting algorithms are essential for a Fizeau interferometer to reconstruct the topography of the optical element’s surface or wavefront. There are differences between different algorithms for reconstruction results, especially for the suppression of noise. To acquire a more accurate Instrument transfer function (ITF) which reflects the axial spatial frequency response of a Fizeau interferometer, the algorithm transfer function which represents the characteristics of the calculation process in spatial frequency was proposed. In this paper, numerical simulations calculated and analyzed several transfer functions of the well-known phase-shifting algorithms. Then, the ITFs of a step plate with a height of 118 nm were measured with different algorithms by experiments and the results were analyzed. The simulations and experimental results indicate that the phase-shifting algorithm has an effect on the ITF measurement but it is not a key factor affecting the ITF measurement.

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Xu Zhang, Qi Lu, Tianzhu Xu, Ying Sun, Shijie Liu, Dmitry Silin, Ilya Kozhevatov, and Efim Khazanov "The influence of phase-shifting algorithms on the instrument transfer function in a Fizeau interferometer", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123190O (19 December 2022); https://doi.org/10.1117/12.2646041

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